Microcantilever array pressure measurement system for biomedical instrumentation

Academic Article


  • An analog signal processing integrated circuit for microcantilever array has been designed for pressure measurement in biomedical applications. The chip consists of analog multiplexer, instrumentation amplifier, sample-and-hold circuit, on-chip voltage and current references, successive approximation register analog-to-digital converter (ADC) and digital control unit. Root sum square (RSS) error from the overall pressure measurement system including microcantilever array and the application specific integrated circuit (ASIC) is only ±1.79 KPa within the measurement range of 0-300 KPa. The 8-bit ADC attains 45.4 dB signal-to-noise-and-distortion ratio (SNDR) and 56.4 dB spurious-free dynamic range (SFDR), while operating at 772 KHz. The integrated circuit has been fabricated using 0.35-μm 2-poly 4-metal CMOS process technology. The chip occupies an area of 1.54 mm2 and consumes 17.8 mW of power with a single 3.3 V supply. © 2009 IEEE.
  • Authors

    Published In

    Digital Object Identifier (doi)

    Author List

  • Qu W; Islam SK; Mahfouz MR; Haider MR; To G; Mostafa S
  • Start Page

  • 321
  • End Page

  • 330
  • Volume

  • 10
  • Issue

  • 2