Optical low‐coherence reflectometry (OLCR) for dimensional monitoring of sheet‐grown silicon

Academic Article

Abstract

  • We report cross‐sectional thickness and flatness measurements for edge‐defined film‐fed growth (EFG) solar silicon using optical low coherence reflectometry (OLCR). The measurement accuracy is ±1.5 μm with the sensor head positioned 1 cm away from the EFG silicon under test. © 1994 John Wiley & Sons, Inc. Copyright © 1994 Wiley Periodicals, Inc., A Wiley Company
  • Digital Object Identifier (doi)

    Author List

  • Lawson CM; Michael RR
  • Start Page

  • 305
  • End Page

  • 307
  • Volume

  • 7
  • Issue

  • 7